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タイトル :High Repetition Rate Pulsed Power Generator for Extreme Ultraviolet Light Source
著者 :Sakugawa, Takashi
Nagano, Kiyohiko
Kondo, Yoshihiko
Namihira, Takao
Katsuki, Sunao
Akiyama, Hidenori
刊行年月日 :2007-6
収録雑誌名 :Digest of Technical Papers-IEEE International Pulsed Power Conference
巻 :2007
開始ページ :702
終了ページ :705
要約(Abstract) :Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed for industrial applications, such as high repetition rate pulsed gas lasers, discharges plasma in water and high energy density plasma for extreme ultraviolet (EUV) light sources. We have studied and developed a new high repetition rate all solid-state pulsed power generator for microlithography to discharge produced plasma (DPP) EUV light source. The developed generator consists of a charger a capacitor bank, a semiconductor switch (IGBT), a pulse transformer and a multi-stage magnetic pulse compression circuit. This system can generate an output peak voltage of 30 kV with voltage rise time of about 85 ns, pulse repetition rate is over 10 kiro pulses per second (kpps) in burst operation. In this work, high repetition rate discharge plasmas were produced by the developed system and this discharge plasma used to EUV light source with simple circuit.
収録種別 :会議発表論文
出版社(者) :Institute of Electrical and Electronics Engineers
権利(Rights) :(c)2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
備考 :16th IEEE International Pulsed Power Conference, Albuquerque, New Mexico, June 17-22, 2007
URI :http://hdl.handle.net/2298/10316
このアイテムの引用には次の識別子を使用してください: http://hdl.handle.net/2298/10316